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CVD & PECVD Vacuum tube furnace

It’s used for CVD experiment in wide variety of reaction temperature about 1100℃ ,for vacuum sintering,vacuum sintering atmosphere,nano materials making,battery material preparation and other many research fields.

Standard Features

1.1200℃ maximum operating temperature.

2.Heating element: Resistance wire.

3.Double layers forced air cooling structure,the temperature is less than 60℃.

4.PID automatic control via SCR(silicon controlled rectifier)power control with phase angle fired,current limiting resistor.

5.30 or 50 segments“time-temperature curve”can be set arbitrarily.

6.Temperature accuracy: ±1℃

7.Touch Screen control

Standard Package

Furnace tube 1 piece

Vacuum flange 1 set

Tube blockage 1 Pair

O-Ring 4 pieces

Crucible hook 1 piece

Thick-walled silicone tube

Vacuum pump 1set

Thermocouple 1piece

Mass flow controller 1 set

Plasma source 1set

User manual 1 book

Optional

Multi heating zones for furnace

Float flowmeter or mass flowmete.

Vacuum pump

Bellows KF infterfaces

KF fast access.

Sliding function for tube furnace

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